Introduction
In a significant advancement for the semiconductor industry, Cambridgeshire-based innovator 42 Technology (42T) has teamed up with Swiss company INFICON AG to introduce a revolutionary smart helium Semiconductor Leak Detection Tool called SMART-Spray
- Precision Microdispensing: SMART-Spray delivers a precisely-controlled microdose of helium, allowing engineers to pinpoint leaks more accurately.
- Bluetooth Integration: The tool is Bluetooth paired with INFICON’s existing UL1000, 3000, 5000, and 6000 fab series leak detectors. It displays live leak rates on its built-in screen.
- One-Handed Operation: Engineers can fully operate SMART-Spray with one hand, leaving the other free for tasks like gripping a ladder.
- Refillable Cartridge: SMART-Spray has its own refillable helium cartridge, eliminating the need for cumbersome helium spray guns connected to cylinders.
This advancement promises to enhance system performance, safety, and environmental compliance. This new handheld device, designed for vacuum leak testing, promises to streamline operations and improve efficiency in semiconductor fabrication plants.
As demand for reliable and precise leak detection continues to grow, the SMART-Spray tool emerges as a game-changer, combining cutting-edge technology with user-friendly features.
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Background
Before the advent of SMART-Spray, the semiconductor industry relied on conventional leak test methods. Here are the two most commonly used techniques:
Bubble Leak Testing: This method involves immersing the sealed device (such as a semiconductor component) in a liquid (usually water or a water-based solution). If there’s a leak, gas (such as helium) escapes and forms bubbles. While this method detects gross leaks, it may not be sensitive enough for fine leaks.
Helium Mass Spectrometer Leak Testing: This technique is more precise and sensitive. It uses a helium mass spectrometer to detect even tiny leaks. Engineers introduce helium into the sealed device, and if there’s a leak, the mass spectrometer detects the helium ions. However, this method requires specialized equipment and expertise.
SMART-Spray’s innovation lies in its precision microdispensing of helium, Bluetooth integration, one-handed operation, and refillable cartridge, making leak detection more efficient and accurate.
Baselining SMART-Spray
SMART-Spray offers several advantages over existing leak detection methods in the semiconductor industry:
Precision: SMART-Spray provides precise microdispensing of helium, allowing engineers to pinpoint leaks more accurately. This precision is crucial for identifying even tiny leaks that might otherwise go undetected.
Bluetooth Integration: Unlike traditional methods, SMART-Spray is Bluetooth paired with INFICON’s existing leak detectors. It displays live leak rates on its built-in screen, making real-time monitoring easier and more convenient.
One-Handed Operation: Engineers can operate SMART-Spray with one hand, freeing up the other hand for tasks like gripping a ladder or handling other equipment. This ergonomic design enhances usability.
Refillable Cartridge: SMART-Spray has its own refillable helium cartridge, eliminating the need for cumbersome helium spray guns connected to cylinders. This simplifies maintenance and reduces downtime.
Overall, SMART-Spray represents a significant advancement in leak detection technology, improving efficiency, safety, and environmental compliance in semiconductor manufacturing.
Key Features of SMART-Spray
The SMART-Spray tool addresses the challenges engineers face with traditional helium spray guns. It integrates a precision gas microdispenser with a remote display function into a single handheld device.
This design allows engineers to operate the system with one hand, freeing the other for tasks such as gripping a ladder. The tool’s key features include:
- Refillable Helium Cartridge: The SMART-Spray has its own refillable helium cartridge, eliminating the need for cumbersome tubing connections.
- Bluetooth Connectivity: The tool is Bluetooth paired to the leak detector, displaying live leak rates on its built-in screen.
- Ease of Use: Engineers can dispense a precisely controlled microdose of helium with one hand, simplifying the leak detection process.
Markus Schwambera, Strategic Product Manager for Leak Detection Tools at INFICON, emphasized the importance of this innovation:
“42 Technology has been instrumental in helping develop the world’s first handheld smart helium microdispenser for use in routine maintenance within semiconductor fabrication plants. SMART-Spray will simplify and speed up vacuum and leak detection processes, critical for ensuring system performance, safety, and environmental compliance.”
Development and Engineering
42 Technology collaborated closely with INFICON on every aspect of SMART-Spray’s design and engineering. The development process included:
- Initial Design Concept and Testing: From proof-of-principle testing to manufacturing prototypes for customer trials.
- Final Design for Production: Industrial design, mechanical design, design for manufacture and assembly, electronics engineering, GUI and firmware development, and verification testing.
Traditional helium spray guns have long been considered cumbersome, requiring engineers to handle a hand-operated trigger valve and manage a separate remote control.
These older systems also result in significant helium wastage and higher background levels of helium, complicating the leak detection process.
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Addressing Industry Challenges
The SMART-Spray tool overcomes these limitations by providing a controlled microdose of helium, reducing waste, and preventing excessive helium dispersion into the atmosphere.
This efficiency not only conserves resources but also enhances the accuracy and speed of leak detection.
INFICON’s new tool is poised to transform the way engineers conduct vacuum leak testing, making the process more efficient and reliable.
By integrating cutting-edge technology with practical design, the SMART-Spray tool represents a significant advancement in the semiconductor industry.
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The Future of Leak Detection
As the semiconductor industry grows, the need for efficient leak detection tools will rise. Innovations like SMART-Spray are crucial. They help maintain system integrity and ensure safety compliance.
The partnership between 42 Technology and INFICON highlights the power of cross-border collaborations.
They combined expertise from different fields. This led to the creation of a groundbreaking tool. It meets current industry needs and sets a new standard for future developments.
