IISc INUP: A Two-Week Crash Course in Nanofabrication

The program covers a wide range of topics, including wafer cleaning, wet and dry oxidation, wet chemical etching, thermal evaporation, RF sputtering, photolithography, mask making, and characterization techniques. Participants will have the opportunity to use state-of-the-art equipment in the clean room facility.
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Exploring the Nanoworld: Advanced Training in Nanofabrication and Characterization

In the realm of cutting-edge technology and scientific advancement, the manipulation of matter at the nanoscale has opened up unprecedented possibilities. Nanotechnology, with its potential to revolutionize industries from electronics to healthcare, demands a deep understanding of fabrication and characterization techniques. To equip researchers and scholars with the essential skills, the Center for Nanoscience and Engineering (CEN) at the Indian Institute of Science (IISc) presents a unique opportunity: the Hands-on Advanced Training Program on Nanofabrication and Characterization Techniques.

Unveiling the Training Modules

Imagine immersing yourself in a state-of-the-art clean room facility, surrounded by high-end nanotechnology equipment. This program is tailor-made for individuals who have previously attended the INUP Familiarization Workshop or Basic Training Program at prestigious institutes such as IISc Bangalore, IIT Bombay, IIT Delhi, IIT Madras, IIT Guwahati, or IIT Kharagpur. The program offers four captivating modules, each delving into a distinct facet of nanofabrication:

  1. MEMS Cantilever Fabrication: This module takes you on a journey through the creation of MEMS (Micro-Electro-Mechanical Systems) cantilevers. From silicon wafer selection to cantilever device release using reactive ion etching, you’ll explore processes like RCA cleaning, oxidation, photolithography, etching, and characterization using advanced techniques like SEM and LDV.
  2. MOS Capacitor Fabrication: Dive into the world of nanoelectronics by mastering the fabrication and electrical characterization of MOS (Metal-Oxide-Semiconductor) capacitors. Gain hands-on experience in crafting devices that are fundamental to modern electronic components.
  3. Solar Cell Fabrication: Harness the power of the sun through the creation of solar cells. This module covers a wide range of processes, including silicon wafer selection, oxidation, lithography, metallization, and characterization. You’ll emerge with a profound understanding of the intricate process behind photovoltaic technology.
  4. Gas Sensors Fabrication: Uncover the secrets of gas sensor technology. Grow oxide layers on silicon, measure oxide thickness with ellipsometry, define arrays through lithography, and delve into the intricacies of diffraction signals. This module offers insights into an area crucial for environmental and industrial applications.

A Glimpse into the Journey

The program kicks off with an induction into clean room protocols and safety practices, setting the stage for a seamless transition into the intricacies of process modules and integration. With a maximum of 5-7 participants per module, the focus remains on personalized learning and practical engagement. However, modules with less than 3 participants may regrettably face cancellation.

As a participant, you will roll up your sleeves and immerse yourself in the world of nanotechnology. From wafer cleaning to oxidation, lithography, and deposition, every step is an opportunity to refine your skills. Under the guidance of experienced technologists, you’ll navigate the complexities of fabrication, gaining proficiency in techniques like thermal evaporation and photolithography.

A Nexus of Learning and Collaboration

The benefits of the program extend beyond hands-on experience. Engage with esteemed faculty members, discussing your research challenges and evolving your ideas. Some of these discussions might culminate in projects to be undertaken at the IISc facilities. The program nurtures collaboration, sparking innovation that could shape the future of nanotechnology.

Selection and Beyond

Selection into this program is based on a merit-based approach. Young faculty members, scholars pursuing PhDs, and those with research interests in related areas will be given precedence. While undergraduate and master’s students might not be eligible, research scientists from national research centers and private industries can participate on a payment basis.


The Hands-on Advanced Training Program on Nanofabrication and Characterization Techniques at CEN, IISc, is not just a training opportunity; it’s a gateway to a world of limitless possibilities. By mastering the art of nanofabrication and characterization, you become part of a community pushing the boundaries of science and technology. Prepare to venture into the nanoworld and emerge with skills that could shape the future.

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